Magirovhosi eLijiejing ane 9-inch Low Chloroprene: Mutemo Mutsva weKuchengetedza Kwakachena Kwekugadzira Semiconductor

Zvichienderana nezvinodiwa zvakanyanya "zvekusava nekanganiso" mukugadzira ma semiconductor, magirovhosi eLijie ane chlorine nitrile ane 9-inch low-chlorine ave michina yekudzivirira inodiwa mukugadzira mawafer uye kurongedza machip nekuda kwekusakwana kwawo kwe ionic residue uye kushanda kwawo kwakachena. Kuburikidza nekugadzira kwakasarudzika, huwandu hwechlorine mumagurovhosi hunodzorwa zvakanyanya pa ≤50ppm - zvichipfuura zvakanyanya mwero weindasitiri we100ppm. Izvi zvinodzivirira njodzi dzengura dzinokonzerwa nekufamba kwema chloride ion panzvimbo dzewafer, zvichisangana nezvinodiwa zvakasimba zvekugadzira ma semiconductor zvekudzora kusvibiswa ne microscopic.

Munguva yekushandiswa kwe lithography, kuchena kwemagirovhosi kunokanganisa zvakananga kupenya kwe photoresist uye mhedzisiro yekubuda pachena. Chigadzirwa mumakamuri ekuchenesa eClass 100,000 uye chakabviswa guruva ne laser, chigadzirwa ichi chinoratidza kuburitswa kwezvikamu zviri pamusoro pasi pe 0.2 particles/square inch—zvichisangana neISO Class 3 cleanroom standards. Izvi zvinobudirira kudzivirira kunamatira kwema micro-particle panzvimbo dze wafer, nokudaro zvichideredza zvikanganiso zve lithography. Dhizaini yacho ine urefu hwe 9-inch inopa kufukidza kwakazara kubva paruoko kusvika pachanza. Pamwe chete ne elastic cuff structure, inoita kuti ishande zvakanaka uku ichidzivirira kuburitswa kweguruva pakuvhura kwe sleeve, ichisangana nezvinodiwa zvakasimba zvenzvimbo dzakachena dzinoshanduka mu lithography processes.

Munguva dzekushanda kwezvinhu zvinokuvadza zvakanyanya zvakaita sekucheka nekuisa maion, magirovhosi aya anoratidza kusasimba kwemakemikari zvakanyanya. Mushure mekuyedzwa kwemaawa makumi maviri nemana mumareagents akafanana e semiconductor akadai se hydrofluoric acid ne phosphoric acid, haaratidzi kuzvimba kana kutsemuka, nekuchinja kwehuremu kuri pasi pe 0.8%. Izvi zvinopa dziviriro yakavimbika yemaoko kune vanoshanda uku vachibvisa njodzi yekusvibiswa kwe reagent kubva mukukuvadzwa kwemagirovhosi. Zvigunwe zvine mavara e 0.02mm akavezwa ne laser, zvichiwedzera kukweshana ne 35% pakubata mawafers e 12-inch uye kuderedza njodzi yekutsvedza kwewafer ne 60%. Izvi zvinoita kuti pave nekuenzanisa pakati pekuchengetedzwa kwekudzivirira uye kugadzikana kwekushanda.

Pari zvino, magirovhosi aya ane zvitupa zvinoenderana neSEMI F57 standards, anoiswa mumitsetse yekugadzira zvinhu zvakawanda munzvimbo dzinotungamira dzinosanganisira SMIC neHua Hong Semiconductor. Anoderedza mwero wezvimedu zvewafer zvinokonzerwa nekubata maoko ne38%, zvichizvisimbisa sesarudzo yakakodzera mukugadzira semiconductor yekudzivirira kuchenesa nekushanda zvakanaka.