Mukugadzira mawafer e semiconductor, maitiro e lithography idanho rakakosha, rinotungamirwa nemazvo rinosarudza goho remachipisi. Se "chinhu chikuru chekuonekwa uye kufungidzira" mukugadzirwa kwewafer, lithography inosanganisira mafambiro ese ebasa - kusanganisira spin coating, exposure, development, etching, uye wet cleaning - uye inoisa zvinodiwa zvakanyanya pakuchena kwezvakatipoteredza, kudzora kusvibiswa, electrostatic protection, uye resistance yemakemikari. Zvidimbu zveguruva zvine mwero we micron, trace ion migration, uye transient electrostatic discharges zvese zvinogona kukonzera zvakananga zvikanganiso zve photoresist, misalignment yemapatani, wafer oxidation, uye micro-short circuits mumacircuits, zvichikonzera kubviswa kwemawafer ese uye zvichikonzera kurasikirwa kukuru kwekugadzirwa. MaFAB mazhinji anonetsekana nekuvandudza goho remaitiro avo e photolithography. Kunyangwe kana michina, maitiro, uye nharaunda zvese zvakarongeka, dambudziko rinowanzova muzvinhu zvinodzivirirwa nemaoko zvisingaite. Magorovhosi eOrdinary Class 1,000 kana maindasitiri haana kukodzera zvachose kune mwero wepamusoro we photolithography process.
Sei Kushandisa Magorovhosi Ekuchenesa Akajairwa Kuchirambidzwa Zvakanyanya MuLithography Process?
Zvisaririra zveupfu zvinokonzera kusvibiswa ne photoresist
Maion akawandisa esulfure nechloride anoparadza macircuit ari pamawafers
Magetsi asingachinji akatadza kudzora, zvikaita kuti pave nekukuvara kwewafer ye photolithography yakagadzirwa nemazvo.
Kutsemuka nekudonha, zvichikonzera zvikanganiso zvekunze kwezvinhu mukugadzirwa
Magorovhosi eNitrile eLjieClean eClass 100 Asina Upfu
Suzhou Leader iri kutarisa pakugadzira mawafer e semiconductor uye kugadzirisa matambudziko ari mukuita lithography, takagadzira magirovhosi e nitrile eClass 100 asina hupfu, asingadhuri, anonyatsoenderana nezvinodiwa zvekugadzirwa kwewafer lithography yese, zvichiita kuti ave zvinhu zvinodzivirira zvinodiwa nemakambani akawanda ekugadzira mawafer nekugadzira mawafer.
1. Maitiro Ekushandisa Upfu Hwakagadzirwa neDichloride: Hapana Kusvibiswa kweUpfu muPhotolithography Maitiro
Ichishandisa nzira yekuchenesa chlorination yakasarudzika semiconductor, nzira iyi haidi kuwedzerwa zvimwe zvinowedzera zvakaita setalc, cornstarch, kana silicone oil mukati menzira yese. Inovimbisa kushandiswa zvakanaka kuburikidza nemaitiro acho pachayo, ichibvisa zvidimbu zveupfu uye zvisaririra zvemafuta esilicone zvinosvibisa photoresist panzvimbo yacho, nokudaro zvichigadzirisa zvachose zvikanganiso zvezvimwe zvinhu mu photolithography process.
2 Kusukurudza nemvura ine nhanho dzakawanda kunobatsira kuti sarufa ive shoma, chlorine ive shoma, uye maion ave mashoma
Kuburikidza nekushambidza kwakawanda nemvura yakachena, zvinowedzerwa zvezvinhu zvisina kucheneswa uye zvasara pamusoro zvinobviswa. Huremu hwemaion esimbi anonyungudika hunodzora zvakanyanya, zvichikonzera kuti NVR (non-volatile residue) isashande zvakanaka. Izvi zvinodzivirira wafer oxidation, coating corrosion, uye etching defects, zvichiita kuti magurovhosi aenderane zvizere nemaitiro e lithography anodiwa emawafer ane 8- ne 12-inch.
Dziviriro yeESD Yakagadziriswa muMold 3 yekuchengetedza maWafers Anonzwa Nemagetsi
Kusiyana nemagirovhosi ekudzivirira static anowanikwa kutengeswa ane machira ekufema enguva pfupi, Gonars inoshandisa tekinoroji yekudzivirira static modification iri mu-mold pane nitrile base material. Izvi zvinoita kuti pave nekugadzikana uye kwakafanana pamusoro pechinhu, zvichiramba zvichibvisa magetsi asingachinji mukati menguva yese yekudzivirira static buildup iyo inogona kukonzera kuparara kwe photoresist uye kukuvara kwe precision wafer circuits. Yakakodzera matanho e core lithography akadai sekubuda pachena nekukura.
4Inochinjika uye Yakasimba, Yakakodzera Kushanda Nema Micron-Level Precision
Magurovhosi aya anochinjika uye anoenderana nechimiro cheruoko. Ane dhizaini isingatsvedzeri paminwe, akareruka uye haana kukura, zvichiita kuti akwanise kushandiswa nemazvo sekubata photolithography wafer, kugadzirisa midziyo, uye kuongorora nemazvo. Anopa kufamba kusingadzoreki uye anodzivirira kutsvedza, achideredza kukuvara kunokonzerwa nekupwanyika netsaona panguva yekushanda nemaoko. Pamusoro pezvo, haapindi muzvinwiwa zvinonyungudutsa zve photolithography uye maasidhi madiki uye alkalis, uye anoramba akasimba asingachemberi kana kubvaruka kunyangwe pakushandiswa kwenguva refu.
5
✅ Kurongedza kwakavharwa ne vacuum-sealed kaviri kunobvisa kusvibiswa kwechipiri
Zvigadzirwa zvakapedzwa zvinoiswa mukamuri rekugezesa reClass 100 uchishandisa paki yakavharirwa kaviri, iyo inobvisa guruva nehunyoro panguva yekuchengetwa nekutakurwa. Hapana kusvibiswa kwechipiri pakuvhurwa kwepakiti, zvichibvumira kuti ishandiswe ipapo ipapo mukamuri rekugezesa reClass 100 lithography.
Nguva yekutumira: Chikunguru-23-2026